全自动硅片插片机的控制系统
控制系统Control system:
1.电器传动系统采用PLC可编程控制器及高分辨率伺服电机;机械传动采用直线轴承滑块、直线轴及滚珠丝杆副,结构简洁,运动精度高。
the electric transmission is through PLC controller and high resolution servo motor; the mechanical transmission is through linear bearing sliding block, shaft and ball screw pair, its structure is compact and movement accuracy is high
2.花篮就位检测,排片滞留报警;可防止碎片和放发生故障。
basket fixture positioning check and tiering chip error alarm, which prevent fragments from causing fault
3.快换花篮治具,适应随时更换产品;水床滑台、水流助推提高排片可靠性。
fast changing basket fixture, it’s suitable to change chips; water-bed sliding table is reliable by water flow boosting
4. 产品执行标准:符合国家相关工业技术标准。
the machine implement criterion which comply with related industry technology criterion.